document: Tool and process improvements from MFC control system technology A new approach to MFC calibration links the physical parameters of nitrogen to the physical characteristics of various process gases . This precludes the conventional need for surrogate gases . What results is a physics-based tuning algorithm and enhanced digital control system that enables rearranging and gas change of digital MFCs . The end result should be better process control through more accurate gas flow . The new method also decreases the number of MFC spare parts required to back up a fab
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