document: Hot controllers Over the last few years , the semiconductor industry has put much emphasis on ways to improve the accuracy of thermal mass flow controllers -LRB- TMFCs -RRB- . Although issues involving TMFC mounting orientation and pressure effects have received much attention , little has been done to address the effect of changes in ambient temperature or process gas temperature . Scientists and engineers at Qualiflow have succeeded to solve the problem using a temperature correction algorithm for digital TMFCs . Using an in situ environmental temperature compensation technique , we calculated correction factors for the temperature effect and obtained satisfactory results with both the traditional sensor and the new , improved thin-film sensors
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