document: A six-degree-of-freedom precision motion stage This article presents the design and performance evaluation of a six-degree-of-freedom piezoelectrically actuated fine motion stage that will be used for three dimensional error compensation of a long-range translation mechanism . Development of a single element , piezoelectric linear displacement actuator capable of translations of 1.67 mu m with 900 V potential across the electrodes and under a 27.4 N axial load and 0.5 mm lateral distortion is presented . Finite element methods have been developed and used to evaluate resonant frequencies of the stage platform and the complete assembly with and without a platform payload . In general , an error of approximately 10.0 % between the finite element results and the experimentally measured values were observed . The complete fine motion stage provided approximately + or-0 .93 mu m of translation and + or-38 .0 mu rad of rotation in all three planes of motion using an excitation range of 1000 V . An impulse response indicating a fundamental mode resonance at 162 Hz was measured with a 0.650 kg payload rigidly mounted to the top of the stage
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